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AMAT 0020-34048
Product Name: Vacuum Chamber Seal Assembly
Product Description: A high-integrity vacuum seal assembly for semiconductor process chambers. It provides reliable, leak-tight sealing between chamber components while maintaining compatibility with ultra-high vacuum environments.
Technical Specifications:
- Material: Fluoroelastomer (Viton) with 316L stainless steel retainer
Detailed content
- Seal Type: Centering ring with O-ring configuration
- Inner Diameter: 200 mm
- Outer Diameter: 220 mm
- Cross-Section: 5.3 mm
- Vacuum Rating: 10⁻¹⁰ Torr ultimate pressure
- Operating Temperature: -20°C to +200°C
- Chemical Compatibility: Resistant to all semiconductor process gases
- Leak Rate: < 1 × 10⁻⁹ atm-cc/sec He
Functional Features:
- Exceptional vacuum sealing performance
- High chemical resistance to process gases
- Excellent thermal stability
- Easy installation and replacement
- Long service life with minimal maintenance
- Compliance with SEMI vacuum standards
Application Scenarios:
- Semiconductor vacuum chambers
- PVD/CVD equipment
- Etching systems
- Wafer processing tools
- Vacuum measurement instruments
