Digital guide
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Detailed content
- Surface Finish: Electropolished to Ra <0.3μm
- Internal Diameter: 300mm
- Wall Thickness: 8mm
- Vacuum Compatibility: UHV suitable
- Operating Temperature: -40°C to +120°C
- Coating: Anodized (60μm thickness) for corrosion resistance
Functional Features:
- Ultra-smooth surface to minimize particle generation
- High dimensional accuracy for perfect fit
- Excellent corrosion resistance to process gases
- Lightweight yet structurally rigid
- Easy to clean and maintain
- Compatible with various vacuum sealing methods
Application Scenarios:
- 200mm wafer processing systems
- PVD and CVD chamber liners
- Etching equipment interior components
- Vacuum chamber protective linings
- Process chamber gas distribution components
