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AMAT 0021-14589

Product Name: GGFP 300mm Xgen Extension Adapter / Blocked Plate Assembly
Product Description: A precision-machined adapter plate and blank-off assembly for 300mm chambers, specifically designed for the Gas Group Feed Panel (GGFP) on XGen platforms. It seals unused ports or adapts interface dimensions for process module customization.
Technical Specifications:
  • Wafer Size: 300mm (12-inch) chamber compatible.

AMAT 0015-35349

Product Name: High-Temperature Thermocouple / Temperature Probe
Product Description: A precision temperature sensor assembly designed for accurate, direct temperature measurement in high-temperature process chambers and on heater pedestals. It provides real-time feedback for closed-loop thermal control.
Technical Specifications:
  • Type: Type K or Type N thermocouple with high-temperature extension wires.

AMAT 0090-00352

Product Name: Digital Pressure / Vacuum Sensor Module
Product Description: A high-precision, solid-state pressure transducer designed for accurate measurement of vacuum and process gas pressures within semiconductor tool chambers and gas lines. It converts pressure into an analog or digital signal for system control.
Technical Specifications:
  • Type: Piezoresistive or capacitance manometer.

AMAT ESC-W2

Product Name: Electrostatic Chuck (ESC) W2 Series Wafer Clamp
Product Description: A high-performance, dual-zone or single-zone electrostatic chuck designed for non-contact clamping of wafers in advanced semiconductor processes. It uses Coulomb or Johnsen-Rahbek forces to secure the wafer and provides precise temperature control.
Technical Specifications:
  • Clamping Technology: Dual-zone Coulombic clamping for superior uniformity.

AMAT 0240-03082

Product Name: Precision Bellows Assembly / Vacuum Feedthrough
Product Description: A flexible, hermetic metal bellows assembly designed for vacuum-compatible linear motion. It transmits mechanical movement into a vacuum chamber while maintaining an airtight seal and isolating internal components.
Technical Specifications:
  • Material: 316L stainless steel for ultra-high vacuum (UHV) compatibility.

AMAT 0200-09200

Product Name: 200mm Edge Ring / Wafer Retaining Ring
Product Description: A precision ring that sits at the perimeter of the 200mm wafer pedestal. It secures the wafer's edge, ensures uniform gas flow across the edge, and minimizes process effects (e.g., bevel deposition or edge etching).
Technical Specifications:
  • Wafer Size: 200mm (8-inch).

AMAT 0200-35256

Product Name: 200mm Chamber Liner / Shield Assembly
Product Description: A one-piece, cylindrical protective liner for 200mm process chambers. It lines the interior walls to protect them from corrosive plasmas and thin-film coatings, while optimizing gas flow and plasma confinement.
Technical Specifications:
  • Material: High-purity aluminum alloy with a hard anodized or plasma-sprayed coating.

AMAT 0200-10203

Product Name: 200mm Quartz Insulator Ring / ESC Isolation Spacer
Product Description: A high-purity fused quartz ring that provides critical electrical isolation between the electrostatic chuck (ESC) and the grounded chamber body. It maintains precise spacing and dielectric separation in high-voltage process environments.
Technical Specifications:
  • Material: High-purity, synthetic fused silica (quartz).

AMAT 0200-02577

Product Name: 200mm Ceramic Lift Pin Plate / Wafer Lift Assembly

Product Description: A high-performance ceramic component designed to support and vertically lift 200mm wafers within semiconductor process chambers. It integrates precision lift pins to safely raise wafers off the electrostatic chuck (ESC) for robot transfer.
Technical Specifications:
  • Wafer Size: 200mm (8-inch).

AMAT 0200-01991

Product Name: 200mm Chamber Focus Ring / Gas Baffle
Product Description: A precision-machined annular component installed within 200mm semiconductor process chambers. It functions to focus plasma towards the wafer surface and optimize the distribution of process gases, ensuring uniform thin-film deposition or etching.
Technical Specifications:
  • Wafer Compatibility: 200mm (8-inch) wafer systems.

AMAT 0100-90886

Product Name: Digital I/O (Input/Output) Interface PCB Assembly
Product Description: A printed circuit board that provides the interface between the system controller and all digital field devices. It handles the input of status signals and output of control signals.
Technical Specifications:
  • I/O Channels: Configurable 16/32 discrete inputs and 16/32 discrete outputs.

AMAT 1400-01056

Product Name: Input Shuttle Limit Sensor (CMP Cleaner)
Product Description: A precision industrial sensor that detects the position of the input shuttle in CMP (Chemical Mechanical Planarization) cleaner systems. It provides position feedback and safety interlocking for wafer transfer shuttles.
Technical Specifications:
  • Type: Inductive or photoelectric proximity sensor.