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AMAT 0021-14589
Product Name: GGFP 300mm Xgen Extension Adapter / Blocked Plate Assembly
Product Description: A precision-machined adapter plate and blank-off assembly for 300mm chambers, specifically designed for the Gas Group Feed Panel (GGFP) on XGen platforms. It seals unused ports or adapts interface dimensions for process module customization.
Technical Specifications:
- Wafer Size: 300mm (12-inch) chamber compatible.
Detailed content
- Material: High-grade 6061-T6 aluminum alloy.
- Surface Finish: Electroless nickel-plated for corrosion resistance and cleanability.
- Sealing: Includes precision-machined grooves for Kalrez or Viton O-rings.
- Mounting: Precision-drilled and tapped holes for bolt-on installation.
Functional Features:
- Provides a hermetic seal for unused chamber ports, maintaining vacuum integrity.
- Facilitates tool configuration changes and upgrades by adapting port interfaces.
- Non-porous plating prevents particle generation and outgassing.
- Easy to install and remove during chamber maintenance or reconfiguration.
Application Scenarios:
- Used on AMAT 300mm XGen and Producer SE platforms.
- Installed on process chambers, gas boxes, and vacuum manifolds to seal or adapt ports.
