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AMAT 0040-39662

Product Name: Chamber Body Assembly
Product Description: A precision-machined main chamber body that forms the core structural component of semiconductor processing vacuum chambers. It provides the enclosed environment for wafer processing while maintaining vacuum integrity.
Technical Specifications:
  • Material: 316L stainless steel or anodized aluminum

AMAT 0100-00423

Product Name: Field Control Processor Module
Product Description: A high-performance embedded controller module designed for real-time control and monitoring of semiconductor manufacturing equipment. It serves as a critical interface between field devices and main system controllers.
Technical Specifications:
  • Processor: 32-bit embedded microcontroller

AMAT 0100-00008

Product Name: TC Gauge PWB Assembly
Product Description: A printed wiring board assembly dedicated to processing signals from thermocouple (TC) vacuum gauges in semiconductor equipment. It provides accurate pressure measurement and signal conditioning for vacuum chamber monitoring.
Technical Specifications:
  • Input: Thermocouple vacuum gauge signals

AMAT 0020-31723

Product Name: 200mm Poly Wafer Pedestal Assembly
Product Description: A precision-engineered wafer support pedestal designed for 200mm wafer processing in semiconductor deposition systems. It provides stable wafer positioning and thermal management during high-vacuum polycrystalline silicon deposition processes.
Technical Specifications:
  • Wafer Compatibility: 200mm (8-inch) wafers with notch orientation

AMAT 0100-90071

Product Description: A high-reliability printed circuit board that manages digital input and output signals between the main system controller and field devices such as sensors, valves, switches, and actuators in semiconductor manufacturing equipment.
Technical Specifications:
  • Input Type: Isolated digital 24V DC inputs

AMAT 0021-17718

Product Name: Quartz Gas Injector Liner
Product Description: A high-purity quartz liner integrated into gas injection systems to ensure clean, uniform gas delivery while resisting chemical attack and thermal stress in semiconductor process chambers.
Technical Specifications:
  • Material: High-purity synthetic quartz glass

AMAT 0021-06961

Product Name: Insulator Sleeve Assembly
Product Description: A cylindrical ceramic sleeve providing electrical isolation and mechanical protection for electrodes, shafts, and feedthroughs inside semiconductor vacuum chambers. It prevents arcing and maintains chamber purity.
Technical Specifications:
  • Material: High-purity macor or alumina ceramic

AMAT 0020-23354

Product Name: Focus Ring Assembly
Product Description: A precision-machined metal ring designed to concentrate and shape plasma distribution above the wafer surface, improving process uniformity and reducing edge effects during semiconductor etching and deposition.
Technical Specifications:
  • Material: High-grade aluminum or stainless steel

AMAT 0021-11110

Product Name: Ceramic Shield Assembly
Product Description: A high-performance ceramic component used to shield sensitive chamber parts from plasma bombardment, thermal stress, and chemical erosion in semiconductor processing environments. It provides electrical isolation and structural stability.
Technical Specifications:
  • Material: High-purity alumina ceramic (Al₂O₃)

AMAT 1150-00203

Product Name: Solenoid Valve Manifold Assembly
Product Description: A multi-channel pneumatic manifold integrated with high-purity solenoid valves for precise control of process gases, coolant lines, and pneumatic actuators in semiconductor production equipment.
Technical Specifications:
  • Valve Type: 2-way or 3-way high-purity solenoid valves

AMAT 3870-06775

Product Name: Signal Conditioning Module
Product Description: An electronic module designed to amplify, filter, and convert analog and digital sensor signals for reliable transmission to main equipment controllers in semiconductor manufacturing tools. It ensures accurate data acquisition under harsh industrial conditions.
Technical Specifications:
  • Input Signal: 4–20mA, 0–10V, thermocouple, RTD

AMAT 0020-30420

Product Name: Electrostatic Chuck Ring Assembly
Product Description: A precision support ring designed to surround and stabilize wafers on electrostatic chucks during high-vacuum semiconductor processing. It ensures edge uniformity and prevents thermal or process irregularities at wafer peripheries.
Technical Specifications:
  • Material: High-purity ceramic or aluminum alloy