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AMAT 0190-0944
Product Name: Pressure Transducer Module
Product Description: A high-precision pressure sensing module designed for real-time monitoring and control of gas pressure and vacuum levels in semiconductor manufacturing utility and process systems.
Technical Specifications:
- Measurement Range: 0.1 Torr to 1000 Torr
Detailed content
- Output Signal: 0–10V analog or 4–20mA current
- Accuracy: ±0.25% full-scale
- Power Supply: 24V DC
- Operating Temperature: 0°C to +60°C
- Media Compatibility: Inert gases, process gases, clean dry air
Functional Features:
- High stability and measurement repeatability
- Built-in temperature compensation
- Over-pressure protection mechanism
- Low hysteresis and fast response time
- Compact sealed construction for harsh environments
- Calibrated for direct integration with AMAT control systems
Application Scenarios:
- Vacuum chamber pressure monitoring
- Process gas line pressure control
- Utility gas delivery systems
- Semiconductor equipment automation
- Etch and deposition process control
