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AMAT 0040-39662
Product Name: Chamber Body Assembly
Product Description: A precision-machined main chamber body that forms the core structural component of semiconductor processing vacuum chambers. It provides the enclosed environment for wafer processing while maintaining vacuum integrity.
Technical Specifications:
- Material: 316L stainless steel or anodized aluminum
Detailed content
- Surface Finish: Electropolished for vacuum compatibility
- Leak Rate: <1×10⁻⁹ atm-cc/sec He
- Operating Pressure: Full vacuum to 15 PSI
- Temperature Range: -20°C to +200°C
- Dimensions: Custom sized for specific chamber models
Functional Features:
- Excellent vacuum sealing capability
- Structural rigidity for chamber integrity
- Multiple ports for gas, electrical, and vacuum connections
- Compatibility with various chamber coatings
- Low outgassing properties
- Easy access for maintenance
Application Scenarios:
- PVD and CVD process chambers
- Etch and strip systems
- Vacuum wafer processing equipment
- AMAT Endura and Producer platforms
- Semiconductor manufacturing cleanrooms
