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AMAT 0015-70041
Product Name: Feedthrough Assembly
Product Description: A vacuum-tight electrical feedthrough designed to transmit electrical signals and power into semiconductor vacuum chambers while maintaining ultra-high vacuum integrity.
Technical Specifications:
- Material: 316L stainless steel body with ceramic insulation
Detailed content
- Pin Configuration: Multiple conductor pins
- Leak Rate: <1×10⁻⁹ atm-cc/sec He
- Voltage Rating: Up to 5kV
- Current Rating: Up to 10A per pin
- Temperature Range: -40°C to +200°C
- Mounting: Flanged connection with vacuum seals
Functional Features:
- Excellent vacuum sealing performance
- High voltage insulation capability
- Multiple conductor configurations
- Corrosion-resistant construction
- Compatibility with UHV environments
- Easy installation and replacement
Application Scenarios:
- Vacuum chamber electrical connections
- Sensor and heater feedthroughs
- RF power transmission
- Semiconductor process chamber instrumentation
- AMAT etch and deposition chambers
