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AMAT 0190-51072

Product Name: Servo Drive Controller Module
Product Description: A high-performance servo drive controller module designed for precise motion control in semiconductor wafer handling and positioning systems.
Technical Specifications:
  • Input Voltage: 24–48V DC

AMAT 0190-09779

Product Name: RF Match Network Controller Module
Product Description: A high-performance RF match network controller module designed for precise impedance matching in semiconductor plasma processing equipment, ensuring efficient RF power transfer to process chambers.
Technical Specifications:
  • Input Voltage: 24V DC ±10%

AMAT 0041-02256

Product Name: Chamber Liner Assembly
Product Description: A high-purity chamber liner assembly designed for semiconductor process chambers, providing a protective interior surface while maintaining process purity and vacuum integrity.
Technical Specifications:
  • Material: High-purity quartz (fused silica)

AMAT 0040-52451

Product Name: TXZ Process Chamber Shower Head Assembly
Product Description: A precision-engineered shower head assembly for TXZ series semiconductor process chambers, providing uniform gas distribution for consistent thin-film deposition processes.
Technical Specifications:
  • Material: 316L stainless steel

AMAT 0020-39361

Product Name: RF Shield Insulator Assembly
Product Description: A specialized insulator assembly designed to provide electrical isolation for RF shield components in semiconductor plasma processing chambers, ensuring stable plasma generation and containment.
Technical Specifications:
  • Material: High-purity alumina ceramic (99.8%)

AMAT 0020-13611

Product Name: Ceramic Isolator Spacer Assembly
Product Description: A high-performance ceramic isolator spacer providing electrical isolation between chamber components while maintaining mechanical stability and vacuum integrity in semiconductor processing equipment.
Technical Specifications:
  • Material: High-purity aluminum nitride (AlN) ceramic

AMAT 0010-77522

Product Name: Wafer Handling Robot Blade Assembly
Product Description: A precision-engineered robot blade assembly designed for non-contact, contamination-free wafer transport in semiconductor vacuum and cleanroom environments. It ensures accurate positioning and secure handling of wafers during manufacturing processes.
Technical Specifications:
  • Material: High-strength 6061-T6 aluminum alloy

AMAT 0010-08538

Product Name: Wafer Handling Robot Blade Assembly
Product Description: A precision-engineered robot blade assembly for semiconductor wafer handling systems. It provides secure, non-contaminating wafer transport in vacuum and cleanroom environments.
Technical Specifications:
  • Material: High-strength aluminum alloy (6061-T6)

AMAT APSA-5977/8

Product Name: Advanced Process Sensor Assembly
Product Description: A high-precision multi-parameter process sensor assembly for semiconductor manufacturing equipment. It provides real-time monitoring of critical process parameters including temperature, pressure, and gas flow rates.
Technical Specifications:
  • Temperature Measurement: -50°C to +450°C (± 0.1°C accuracy)

AMAT 0150-20075

Product Name: EMO Interconnect Cable Assembly
Product Description: A specialized emergency stop (EMO) interconnect cable assembly for semiconductor manufacturing equipment. It provides reliable, fail-safe communication between EMO buttons and the main safety control system.
Technical Specifications:
  • Conductor Material: 18 AWG tinned copper

AMAT 0130-11002

Product Name: Digital I/O Control Card
Product Description: A high-performance digital input/output control card for semiconductor equipment automation. It provides reliable interface between the main controller and various chamber actuators and sensors.
Technical Specifications:
  • Input Voltage: 24 V DC ± 10%

AMAT 0090-70015

Product Name: Gas Leak Detection PCB Assembly
Product Description: A high-sensitivity gas leak detection PCB assembly for semiconductor manufacturing equipment. It provides real-time monitoring and detection of process gas leaks in vacuum systems.
Technical Specifications:
  • Input Voltage: 24 V DC ± 10%