Digital guide
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AMAT 0090-70015
Product Name: Gas Leak Detection PCB Assembly
Product Description: A high-sensitivity gas leak detection PCB assembly for semiconductor manufacturing equipment. It provides real-time monitoring and detection of process gas leaks in vacuum systems.
Technical Specifications:
- Input Voltage: 24 V DC ± 10%
Detailed content
- Power Consumption: < 6 W
- Detection Sensitivity: < 1 ppm for standard process gases
- Response Time: < 1 second
- Communication Interface: RS-485, Modbus RTU
- Operating Temperature: 0°C to +50°C
- Dimensions: 140 mm × 90 mm × 20 mm
- Weight: 0.35 kg
- Alarm Output: Relay contact (24 V DC, 1 A)
Functional Features:
- Ultra-high sensitivity for early leak detection
- Fast response time for immediate safety response
- Multi-gas detection capability
- Real-time data communication to control system
- Visual and audible alarm indicators
- Self-diagnostic functionality
Application Scenarios:
- Semiconductor process gas delivery systems
- Vacuum chamber leak monitoring
- Gas distribution manifolds
- Etching and deposition equipment
- Safety monitoring systems for cleanroom environments
