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AMAT 0020-13611
Product Name: Ceramic Isolator Spacer Assembly
Product Description: A high-performance ceramic isolator spacer providing electrical isolation between chamber components while maintaining mechanical stability and vacuum integrity in semiconductor processing equipment.
Technical Specifications:
- Material: High-purity aluminum nitride (AlN) ceramic
Detailed content
- Outer Diameter: 80mm
- Inner Diameter: 50mm
- Thickness: 15mm
- Thermal Conductivity: >190 W/m·K
- Dielectric Strength: >15 kV/mm
- Compressive Strength: >2100 MPa
- Operating Temperature: -40°C to +850°C
- Vacuum Compatibility: UHV suitable (10⁻⁹ Torr)
- Dimensional Tolerance: ±0.03mm
Functional Features:
- Exceptional thermal conductivity for efficient heat dissipation
- Superior electrical insulation properties
- High mechanical strength and shock resistance
- Low thermal expansion coefficient matching silicon wafers
- Chemical inertness to semiconductor process gases
- Precision machining for tight dimensional control
- Zero particle generation under process conditions
Application Scenarios:
- Semiconductor process chamber electrical isolation
- Electrostatic chuck (ESC) assemblies
- RF power delivery system components
- High-temperature wafer processing equipment
- Vacuum chamber structural supports
