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AMAT 0020-39361
Product Name: RF Shield Insulator Assembly
Product Description: A specialized insulator assembly designed to provide electrical isolation for RF shield components in semiconductor plasma processing chambers, ensuring stable plasma generation and containment.
Technical Specifications:
- Material: High-purity alumina ceramic (99.8%)
Detailed content
- Outer Diameter: 180mm
- Inner Diameter: 140mm
- Height: 25mm
- Dielectric Constant: 9.8 at 1MHz
- Volume Resistivity: >10¹⁴ Ω·cm
- Maximum RF Voltage: 15kV RMS
- Operating Temperature: -30°C to +600°C
- Surface Finish: Polished to Ra <0.3μm
- Leak Rate: <1×10⁻¹⁰ atm-cc/sec He
Functional Features:
- Excellent RF insulation properties for high-voltage applications
- High thermal stability at elevated temperatures
- Low dielectric loss for efficient RF transmission
- Chemical resistance to plasma environments
- Smooth surface to minimize particle traps
- Precision manufacturing for perfect fit
- Long service life in harsh plasma conditions
Application Scenarios:
- Semiconductor plasma etching chambers
- PVD/CVD RF shield assemblies
- Plasma-enhanced deposition systems
- RF power delivery components
- Vacuum chamber plasma containment
