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AMAT 0200-35296

Product Name: Inner Gas Feed Plug Assembly
Product Description: A precision-engineered component for delivering process gases directly into semiconductor processing chambers. It ensures uniform gas distribution and maintains vacuum integrity.
Technical Specifications:
  • Material: High-purity 316L stainless steel

AMAT 0020-24411

Product Name: Ceramic Insulator Spacer Assembly
Product Description: A precision ceramic component providing electrical isolation and precise spacing between components in semiconductor vacuum chambers. It maintains proper alignment while preventing electrical arcing.
Technical Specifications:
  • Material: High-purity macor ceramic

AMAT 0100-09110

Product Name: Field Control Processor Module
Product Description: A high-performance embedded controller module designed for real-time control and monitoring of semiconductor manufacturing equipment. It serves as the primary interface between equipment and factory automation systems.
Technical Specifications:
  • Processor: 32-bit embedded microcontroller

AMAT 0040-47677

Product Name: Chamber Bellows Assembly
Product Description: A flexible, vacuum-tight component enabling linear movement within semiconductor processing chambers while maintaining pressure integrity. It accommodates lift pins, gas lines, and other moving components.
Technical Specifications:
  • Material: 316L stainless steel

AMAT 0224-40643

Product Name: Chamber Top Panel Assembly
Product Description: A structural and functional component forming the upper section of semiconductor processing chambers. It provides mounting for process components and maintains vacuum integrity.
Technical Specifications:
  • Material: Anodized aluminum or 316L stainless steel

AMAT 0240-33168

Product Name: RF Match Network Assembly
Product Description: A high-performance impedance matching network designed for precise RF power delivery in semiconductor plasma processing equipment. It ensures maximum power transfer between the RF generator and process chamber.
Technical Specifications:
  • Frequency Range: 13.56 MHz (standard)

AMAT 0020-24719

Product Name: 200mm Aluminum Cover Ring Assembly
Product Description: A precision-machined aluminum component designed to surround and protect 200mm wafers during semiconductor processing. It ensures proper wafer positioning and prevents edge effects during deposition and etch processes.
Technical Specifications:
  • Material: High-purity aluminum (AL 233-3889-52)

AMAT 0021-09914

Product Name: Blocker Plate Assembly
Product Description: A precision-engineered metal component used to control gas flow and plasma distribution within semiconductor deposition and etch chambers. It optimizes process uniformity and protects critical chamber components.
Technical Specifications:
  • Material: High-grade aluminum or stainless steel

AMAT 1410-01130

Product Name: Exhaust Heater Assembly
Product Description: A precision heating unit designed to maintain optimal temperatures in semiconductor equipment exhaust systems, preventing condensation and ensuring consistent gas flow.
Technical Specifications:
  • Heating Element: Stainless steel sheathed resistance heater

AMAT 0021-21771

Product Name: Ceramic Isolator Ring Assembly
Product Description: A high-purity ceramic component engineered for electrical isolation and structural support within semiconductor vacuum processing chambers. It provides robust insulation between high-voltage components and grounded chamber structures.
Technical Specifications:
  • Material: High-purity alumina (Al₂O₃) ceramic

AMAT 0090-A0693

Product Name: PMT-100 Photomultiplier Tube Detector Assembly
Product Description: A high-sensitivity optical detection module designed for process endpoint detection in semiconductor manufacturing equipment.
Technical Specifications:
  • Detector Type: Photomultiplier tube (PMT)

AMAT 0050-91046

Product Name: Chemical Delivery Tube Assembly
Product Description: A precision-engineered fluid transfer component designed for high-purity chemical delivery in semiconductor fabrication processes.
Technical Specifications:
  • Material: High-purity PFA or PTFE