AMAT

You are here:
  1. Home
  2. AMAT
  3. Page 89

AMAT 0050-90911 High-Temperature Flexible Hose Assembly

Product Description: A high-performance flexible hose assembly designed for high-temperature fluid and gas transfer between semiconductor equipment modules. It provides flexibility for dynamic connections while maintaining UHP purity and thermal stability in demanding process environments.
Technical Specifications:
  • Inner Tube: PFA (perfluoroalkoxy) fluoropolymer
  • Reinforcement: 316L stainless steel braid (double-layer)

AMAT 0030-70085 Equipment Front Panel & Light Pen Interface

Product Description: A human-machine interface (HMI) front panel assembly with integrated light pen functionality, designed for local operation and diagnostics of AMAT semiconductor processing equipment. It provides intuitive control, status monitoring, and system configuration capabilities for equipment operators and maintenance personnel.
Technical Specifications:
  • Display: 10.4-inch color TFT LCD (800×600 resolution)
  • Input: Light pen (stylus) + membrane keypad

AMAT 0010-56351 Wafer Lift Pin Assembly

Product Description: A precision-engineered wafer lift pin assembly designed for vertical movement of 200mm wafers within semiconductor process chambers. It provides smooth, repeatable wafer positioning between the pedestal and transfer robot, ensuring reliable wafer handling without damage.
Technical Specifications:
  • Wafer Compatibility: 200mm (8-inch) wafers
  • Pin Material: High-purity alumina (Al₂O₃) ceramic
  • Pin Diameter: 6mm

AMAT 0020-29750 Ceramic Chamber Liner

Product Description: A high-purity ceramic liner designed to protect 200mm process chamber walls from plasma erosion and chemical contamination. It provides a chemically inert, low-particle surface for advanced semiconductor manufacturing processes, extending chamber maintenance intervals.
Technical Specifications:
  • Material: 99.6% high-purity alumina (Al₂O₃)
  • Density: > 3.9 g/cm³
  • Dielectric Strength: > 15kV/mm

AMAT 58900145R RF Generator Control Board

Product Description: A high-performance printed circuit board (PCB) designed for precise control and monitoring of RF generators in plasma processing equipment. It manages RF power output, frequency tuning, and impedance matching to ensure optimal plasma stability and process repeatability.
Technical Specifications:
  • Processor: 32-bit ARM Cortex-M7 microcontroller
  • RF Frequency Range: 400kHz to 60MHz

AMAT 0020-30552 Wafer Pedestal Assembly

Product Description: A high-precision electrostatic chuck (ESC) pedestal assembly engineered for 200mm wafer handling and processing in semiconductor manufacturing equipment. It provides stable wafer clamping, precise temperature control, and electrical biasing for advanced thin-film deposition and etching processes.
Technical Specifications:
  • Wafer Compatibility: 200mm (8-inch) silicon wafers
  • Chuck Type: Electrostatic (Coulombic) ESC

AMAT 0050-37915 Gas Line Weldment Assembly

Product Description: A precision-engineered, leak-tight gas line weldment assembly designed for ultra-high-purity (UHP) gas delivery systems in semiconductor manufacturing. It provides a seamless, contamination-free pathway for process gases between gas panels and process chambers, ensuring consistent gas flow and purity.
Technical Specifications:
  • Material: 316L electropolished stainless steel (Ra < 0.4 μm)
  • Connection Type: VCR face-seal fittings (1/4" & 3/8" standard)

AMAT 0021-39943 Pump Port Liner Assembly

Product Description: A precision-engineered liner for vacuum pump ports, designed to protect pump interfaces from process contamination and maintain optimal vacuum performance. It features an IPS-cleaned surface for ultra-high purity applications.
Technical Specifications:
  • Material: 6061-T6 aluminum alloy (electropolished)
  • Surface Finish: Ra <0.4μm (IPS cleaning standard)

AMAT 0190-16177 Wafer Position Sensor Assembly

Product Description: A non-contact optical sensor system designed for precise detection and verification of wafer position in semiconductor handling and processing equipment. It ensures accurate wafer placement and prevents processing errors.
Technical Specifications:
  • Sensing Principle: Reflective optical triangulation
  • Detection Range: 5–50mm
  • Resolution: 0.1mm

AMAT 0021-45259 Ceramic Chamber Liner Assembly

Product Description: A high-purity ceramic liner designed to protect process chamber walls from plasma damage and contamination. It provides a chemically inert surface for advanced semiconductor manufacturing processes.
Technical Specifications:
  • Material: 99.6% high-purity alumina (Al₂O₃)
  • Density: >3.9 g/cm³
  • Dielectric Strength: >15kV/mm

AMAT 0100-90708 Vacuum Interlock Safety Module

Product Description: A critical safety PCB module that implements vacuum system interlock logic to protect personnel and equipment from hazardous conditions. It monitors vacuum levels and initiates safety protocols when thresholds are breached.
Technical Specifications:
  • Input Channels: 8 vacuum sensor inputs (analog/digital)
  • Output Channels: 12 relay outputs (2A @ 30V DC)

AMAT 0190-00958 RF Match Network Controller

Product Description: A specialized controller module for automatic tuning of RF match networks in plasma processing equipment. It ensures maximum power transfer efficiency between RF generators and process chambers.
Technical Specifications:
  • RF Frequency Range: 400kHz–60MHz
  • Power Handling: Up to 10kW continuous
  • Control Interface: Analog (0–10V) and digital (RS-232/Ethernet)