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AMAT 0100-90708 Vacuum Interlock Safety Module

Product Description: A critical safety PCB module that implements vacuum system interlock logic to protect personnel and equipment from hazardous conditions. It monitors vacuum levels and initiates safety protocols when thresholds are breached.
Technical Specifications:
  • Input Channels: 8 vacuum sensor inputs (analog/digital)
  • Output Channels: 12 relay outputs (2A @ 30V DC)

AMAT 0190-00958 RF Match Network Controller

Product Description: A specialized controller module for automatic tuning of RF match networks in plasma processing equipment. It ensures maximum power transfer efficiency between RF generators and process chambers.
Technical Specifications:
  • RF Frequency Range: 400kHz–60MHz
  • Power Handling: Up to 10kW continuous
  • Control Interface: Analog (0–10V) and digital (RS-232/Ethernet)

AMAT 0100-35070 Vacuum System Controller Board

Product Description: A high-performance printed circuit board (PCB) designed for precise control and monitoring of vacuum systems in semiconductor processing equipment. It manages vacuum pumps, valves, and pressure sensors to maintain optimal chamber conditions.
Technical Specifications:
  • Processor: 32-bit ARM Cortex-M4 microcontroller
  • Memory: 16MB SDRAM, 32MB Flash

AMAT 0150-92402 SCIM Modem Communication Module

Product Description: A specialized communication module implementing the SCIM (Semiconductor Equipment Communication Interface) protocol, enabling reliable data exchange between AMAT process equipment and factory host systems.
Technical Specifications:
  • Protocol Support: SCIM, SECS-II (SEMI E5), HSMS (SEMI E37)
  • Interface: Ethernet 10/100Base-T, RS-232 serial

AMAT 0050-62843 Precision Flow Meter Assembly

Product Description: A high-precision thermal mass flow meter designed for accurate measurement and control of process gases in semiconductor manufacturing environments. It provides real-time flow data for critical gas delivery systems.
Technical Specifications:
  • Measurement Principle: Thermal mass flow sensing
  • Flow Range: 0–500 sccm (standard cubic centimeters per minute)

AMAT 0190-19374 High-Power Industrial Lamp Assembly

Product Description: A 120V, 2100W linear quartz halogen lamp assembly engineered for rapid thermal processing (RTP) and wafer heating applications in semiconductor fabrication.
Technical Specifications:
  • Voltage: 120V AC
  • Power Rating: 2100W
  • Lamp Type: Single-ended quartz halogen
  • Filament Material: Tungsten

AMAT 0140-78028 Cable Harness Assembly

Product Description: A high-performance, custom-configured cable harness assembly designed for signal and power transmission in semiconductor manufacturing equipment. It serves as a critical interconnect between control modules, sensor arrays, and power distribution units within AMAT’s advanced process chambers.
Technical Specifications:
  • Conductor Material: High-purity oxygen-free copper (OFC) for minimal signal loss
  • Insulation: Fluoropolymer (FEP/PFA) rated for 200°C continuous operation

AMAT 0020-04541 Precision Support and Positioning Component

Product Description: It is a high-precision support and positioning component applied in semiconductor equipment, which is used to maintain the relative position of key components in the chamber, ensure the consistency and stability of the process, and reduce the failure caused by mechanical offset.
Technical Specifications:
  • Material: high-strength, low-pollution special ceramic or alloy
  • Dimensional accuracy: micron-level positioning accuracy

AMAT 0200-10163 Process Equipment Execution Module Component

Product Description: This is an execution module component used in semiconductor process equipment, which participates in the mechanical action, gas control or position adjustment in the process, and is an important part to realize the process flow.
Technical Specifications:
  • Material: composite material matching the equipment environment
  • Dimensional accuracy: high-precision machining to ensure action consistency

AMAT 0022-94001 High-Performance Sealing and Isolation Component

Product Description: It is a special sealing and isolation component for semiconductor vacuum chamber, which is used to seal the chamber, isolate the gas and maintain the vacuum degree, and is one of the key components to ensure the stability of the process environment.
Technical Specifications:
  • Material: high-performance fluororubber or metal sealing material
  • Vacuum performance: ultra-low leak rate, meeting high vacuum requirements

AMAT 0040-76429 Control and Transmission Interface Component

Product Description: This is an interface component used for signal control and energy transmission in semiconductor manufacturing equipment, which realizes the stable connection between the control unit and the execution mechanism, and ensures the coordinated operation of the equipment.
Technical Specifications:
  • Electrical performance: meet the control signal and power transmission standards
  • Environmental adaptability: suitable for vacuum, high temperature and plasma environment

AMAT 0040-43978 Sensing and Monitoring Assembly

Product Description: It is a sensing and monitoring matching component used in semiconductor equipment, which is used to assist the sensor to install, position and protect, and ensure the accuracy and stability of temperature, pressure, position and other parameters detection.
Technical Specifications:
  • Compatible with standard sensors of semiconductor equipment