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AMAT 5400-D-0025

  • Product Name: Precision Solid-State Relay Module
  • Product Description: An industrial-grade, DC-controlled solid-state relay (SSR) designed for reliable, low-voltage switching of high-current loads in the equipment's control system.
  • Technical Specifications:
    • Input Control: 3-32V DC (logic level compatible).

AMAT 022-27837

  • Product Name: Ceramic Chamber Liner Insert
  • Product Description: A high-purity, machined ceramic component that lines the interior of a semiconductor process chamber, protecting the chamber walls and maintaining process purity.
  • Technical Specifications:
    • Material: High-density, high-purity alumina (Al2O3, > 99.8%).

AMAT 0190-76190

  • Product Name: Advanced RF Match Network Module
  • Product Description: An automatic radio frequency (RF) impedance matching network designed to optimize power transfer from the RF generator to the plasma load in a process chamber.
  • Technical Specifications:
    • Frequency Range: 13.56 MHz (standard for semiconductor plasma processes).

AMAT 0190-00312

  • Product Name: High-Precision Pressure Transducer
  • Product Description: An absolute capacitance manometer for high-accuracy measurement of gas pressure in high and ultra-high vacuum (UHV) systems.
  • Technical Specifications:
    • Measurement Range: 1 Torr full scale, with high accuracy spanning 10-3 Torr to 1 Torr.

AMAT FC-0010-0047

Product Name: Thermal Mass Flow Controller
Product Description: A high‑precision thermal‑based mass flow controller designed to measure and regulate the flow rate of process gases with exceptional stability and repeatability in semiconductor manufacturing.
Technical Specifications:
  • Sensing Principle: Thermal mass flow detection

AMAT 0190-35521

Product Name: RF Match Network Variable Capacitor Assembly
Product Description: A high‑power vacuum variable capacitor used within RF impedance matching networks to adjust capacitance dynamically and maintain optimal power transfer to plasma loads.
Technical Specifications:
  • Capacitance Range: 10–500 pF

AMAT 3400-01109

Product Name: Male VCR Pipe Plug Fitting
Product Description: A high‑purity metal plug used to seal unused ports in gas lines, manifolds, and chamber fittings, maintaining vacuum integrity and cleanliness in ultra‑high purity gas systems.
Technical Specifications:
  • Material: 316L electropolished stainless steel

AMAT 0015-20124

Product Name: Motor Brake and Clutch Assembly
Product Description: An electromagnetic brake and clutch unit designed to secure robot arm position during power interruptions, ensure safe motion control, and prevent unintended movement in wafer handling systems.
Technical Specifications:
  • Operating Voltage: 24V DC

AMAT 0021-36627

Product Name: Chamber Gas Baffle Shield Assembly
Product Description: A multi‑functional metal shield that redirects and diffuses process gas flow, confines plasma, and protects chamber walls from sputtered deposition in PVD and etch environments.
Technical Specifications:
  • Material: High‑purity aluminum with ceramic plasma‑resistant coating

AMAT 0010-27495

Product Name: Robot Drive Motor Encoder Assembly
Product Description: A high‑resolution optical encoder integrated with a servo motor to provide real‑time position, speed, and direction feedback for wafer handling robot motion control systems.
Technical Specifications:
  • Encoder Type: Incremental optical encoder

AMAT 3420-01078

Product Name: High‑Purity Stainless Steel Pipe Fitting Adapter
Product Description: A precision‑machined metal adapter used to connect different sizes or types of ultra‑high purity gas lines, ensuring hermetic sealing and consistent flow in semiconductor gas delivery systems.
Technical Specifications:
  • Material: 316L VIM‑VAR stainless steel

AMAT 0150-75041

Product Name: High‑Voltage Power Cable Assembly
Product Description: A heavy‑duty, shielded power cable assembly engineered to transmit high‑voltage DC or RF power between power supplies, match networks, and process chamber components.
Technical Specifications:
  • Conductor: Stranded oxygen‑free tinned copper