Digital guide
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AMAT 0041-49839
- Product Name: Turbo Pump Adapter Flange
- Product Description: A precision-machined adapter flange that provides a hermetic, high-vacuum seal between a turbomolecular pump and a semiconductor process chamber foreline.
- Technical Specifications:
- Material: 6061-T6 aluminum, hard-anodized finish.
Detailed content
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- Dimensions: 200mm ISO-K (NW) bolt circle.
- Centering: Integral aluminum centering ring.
- Sealing: Dual elastomer seal grooves (FKM/Viton).
- Porting: 1x 1/4″ VCR port for pressure gauge/vent.
- Functional Features:
- Ensures leak-tight connection (leak rate < 1 x 10-9 atm-cc/sec He).
- Provides electrical grounding for pump-chamber bonding.
- Reduces vibration transfer from pump to chamber.
- Compatible with UHV bake-out up to 150°C.
- Application Scenarios: Connects turbo pumps (e.g., Seiko Seiki, Edwards, Pfeiffer) to Etch, PVD, and CVD chambers on all major Applied Materials platforms.
