Digital guide
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AMAT 0190-09488
- Product Name: High-Purity Gas Filter Assembly
- Product Description: A point-of-use gas filter designed to remove sub-micron particulates from high-purity process gases to maintain wafer cleanliness.
- Technical Specifications:
- Filtration Rating: High-efficiency 0.003 μm (3 nm) absolute rating.
Detailed content
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- Housing Material: 316L VIM-VAR stainless steel with electropolish finish.
- Element Type: Pleated, sintered metal media for high flow and low pressure drop.
- Connection: 1/2″ VCR male/female connections.
- Functional Features:
- Removes nanoscale particles to prevent defects on wafer surfaces.
- Full flow rate with minimal pressure loss.
- Completely cleanable and reusable for cost-effective operation.
- Designed for compatibility with corrosive and specialty gases.
- Application Scenarios: Installed directly upstream of process chambers and gas injectors for all critical processes requiring ultra-high purity gas (UHP).
