Digital guide
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AMAT 0020-28357
- Product Name: DC Bias Isolator Assembly
- Product Description: A high-voltage ceramic isolator assembly that provides electrical isolation between the grounded chamber body and the DC-biased pedestal electrode.
- Technical Specifications:
- Material: 99.8% high-purity alumina (Al2O3) ceramic.
Detailed content
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- Dielectric Strength: > 25 kV/mm.
- Dimensions: 100mm OD x 60mm ID x 40mm.
- Sealing: Flange-mounted with FFKM seal for UHV compatibility.
- Functional Features:
- Prevents electrical arcing and ground leakage.
- Maintains vacuum integrity under high voltage stress.
- Resists degradation from plasma and process byproducts.
- High mechanical strength to support pedestal weight.
- Application Scenarios: Installed in high-power PVD chambers (Endura) and reactive ion etch (RIE) chambers where DC bias is applied to the wafer pedestal.
