Digital guide
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AMAT 0021-19281
- Product Name: Quartz Gas Injector Liner
- Product Description: A high-purity fused quartz liner for a radial gas injector, designed to deliver process gases uniformly while protecting the injector body from plasma exposure.
- Technical Specifications:
- Material: High-purity fused silica (quartz), > 99.99% SiO2.
Detailed content
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- Dimensions: 220mm OD x 180mm ID x 50mm height.
- Tolerance: ±0.1mm dimensional accuracy.
- Surface Finish: Fire-polished interior (Ra < 0.2 μm).
- Functional Features:
- Excellent plasma and chemical resistance to halogen etchants (CF4, Cl2, HBr).
- High thermal shock resistance, stable under extreme thermal cycling.
- Low metallic contamination, critical for high-yield device fabrication.
- Transparent to infrared for in-situ temperature monitoring.
- Application Scenarios: Used in dielectric etch chambers (Centura DPS II) for shallow trench isolation (STI) and inter-layer dielectric (ILD) etching processes.
