Digital guide
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Detailed content
- Flow Range: Custom calibrated for specific gas types
- Seal Material: Perfluoroelastomer for chemical resistance
- Leak Rate: <1×10⁻⁹ atm-cc/sec He
- Actuation Type: Pneumatic or motor-driven
- Body Material: 316L stainless steel with electropolish
Functional Features:
- Precise and repeatable flow regulation
- Low dead volume to minimize gas retention
- Excellent chemical resistance to aggressive gases
- Fast response for dynamic process adjustment
- Long service life with low maintenance requirements
- Compatible with high-purity gas delivery standards
Application Scenarios:
- Semiconductor process gas delivery
- CVD and ALD precursor control
- Etching gas mixing systems
- Vacuum purging and venting circuits
- Cleanroom utility gas distribution
