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AMAT 0010-01198
Product Name: Temperature Monitor Board
Product Description: A printed circuit board assembly dedicated to collecting, conditioning, and processing temperature signals from multiple sensors in semiconductor processing equipment.
Technical Specifications:
- Sensor Inputs: Thermocouple, RTD, thermistor compatible
Detailed content
- Sampling Rate: 10 samples per second per channel
- Output Interface: Analog 0–10V or digital RS-485
- Power Input: 24V DC
- Operating Temperature: 0°C to +60°C
- Channel Isolation: Galvanic isolation up to 1500V
Functional Features:
- Multi-channel simultaneous temperature monitoring
- High-resolution analog-to-digital conversion
- Built-in noise filtering and signal amplification
- Over-temperature alarm and fault detection
- Stable performance in electromagnetic environments
- Direct compatibility with AMAT main controllers
Application Scenarios:
- Chamber and heater temperature monitoring
- Wafer pedestal thermal control
- Gas line and vaporizer temperature sensing
- Semiconductor equipment control systems
- Factory automation data acquisition
