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AMAT 0021-64960
Product Name: Ceramic Isolator Assembly
Product Description: A high-purity ceramic component engineered for electrical isolation and structural support within semiconductor vacuum processing chambers. It provides robust insulation between high-voltage components and grounded structures.
Technical Specifications:
- Material: High-purity alumina (Al₂O₃) ceramic
Detailed content
- Dielectric Strength: >20 kV/mm
- Maximum Operating Temperature: 1500°C
- Vacuum Compatibility: Ultra-high vacuum (UHV) rated
- Surface Finish: Ra < 0.8 μm
- Dimensions: Precision machined to OEM specifications
Functional Features:
- Superior electrical insulation properties
- Excellent thermal stability in extreme environments
- Chemical resistance to plasma and process gases
- Low outgassing for vacuum integrity
- Non-contaminating material composition
- Precision dimensional tolerances
Application Scenarios:
- RF plasma chamber electrode isolation
- Wafer chuck and pedestal support
- Gas distribution plate mounting
- Vacuum feedthrough insulation
- High-voltage component separation
