Digital guide
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AMAT 0015-35349
Product Name: High-Temperature Thermocouple / Temperature Probe
Product Description: A precision temperature sensor assembly designed for accurate, direct temperature measurement in high-temperature process chambers and on heater pedestals. It provides real-time feedback for closed-loop thermal control.
Technical Specifications:
- Type: Type K or Type N thermocouple with high-temperature extension wires.
Detailed content
- Temperature Range: -100°C to +1200°C.
- Sheath Material: Inconel 600 or alumina ceramic for high-temperature corrosion resistance.
- Connection: Standard thermocouple connector or hermetically sealed feedthrough.
- Accuracy: Class 1 precision (±1.5°C).
Functional Features:
- Fast response time to capture rapid temperature changes.
- High chemical resistance to oxidizing and reducing atmospheres.
- Hermetically sealed to prevent contamination in UHV environments.
- Mechanically robust to withstand vibration and thermal cycling.
Application Scenarios:
- Embedded in heater pedestals, susceptors, and chamber walls.
- Used for critical temperature monitoring in thermal CVD, oxidation, and diffusion processes.
