Digital guide
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Detailed content
- Internal Diameter: 250mm
- Wall Thickness: 10mm
- Surface Finish: Electropolished internally to Ra <0.25μm
- Flange Standards: ISO 100 CF
- Vacuum Rating: 10⁻¹⁰ Torr ultimate pressure
- Operating Temperature: -20°C to +100°C
Functional Features:
- Exceptional vacuum integrity with zero leakage
- Smooth internal surfaces to minimize particle traps
- Robust construction for long service life
- Compatibility with various chamber accessories
- Easy integration with heating/cooling systems
- Compliance with SEMI standards
Application Scenarios:
- 150mm wafer processing systems
- CVD (Chemical Vapor Deposition) chambers
- PVD chambers
- Etching equipment
- Wafer cleaning systems
