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AMAT 0226-09003
Product Name: RF Signal Harness Assembly
Product Description: A high-performance RF signal harness assembly designed for reliable signal transmission between RF power modules and process chambers in semiconductor manufacturing equipment. It ensures low-loss, interference-free RF signal delivery in high-vacuum environments.
Technical Specifications:
- Material: High-purity PTFE insulation with tinned copper conductors
Detailed content
- RF Frequency Range: DC to 40 MHz
- Impedance: 50 ohms ± 1%
- Voltage Rating: 5 kV RMS
- Current Capacity: 10 A
- Length: Custom-configurable (standard 2.5 meters)
- Connector Type: SMA male/female
- Operating Temperature: -20°C to +85°C
- Shielding: Triple-layer braided shielding (95% coverage)
Functional Features:
- Ultra-low signal loss for efficient RF power transmission
- Superior electromagnetic shielding to prevent cross-talk
- High voltage insulation for safe operation
- Flexible yet durable construction for easy installation
- Hermetically sealed connectors for vacuum compatibility
- Long service life with minimal signal degradation
Application Scenarios:
- Semiconductor plasma processing equipment
- RF power delivery systems
- Etching chambers
- PVD/CVD process tools
- Vacuum measurement and control systems
