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AMAT 3300-07824 Graphite Gasket Seal Assembly
Product Description: A high-temperature sealing component manufactured from premium-grade graphite material, designed for reliable sealing in extreme temperature semiconductor processing applications. Provides excellent thermal stability and chemical resistance in demanding process environments.
Technical Specifications:
- Material: High-purity flexible graphite foil (99.9% carbon content)
- Construction: Multi-layer laminated graphite with stainless steel insert
Detailed content
- Inner Diameter: 8.5″ (215.9mm)
- Outer Diameter: 10.5″ (266.7mm)
- Thickness: 0.125″ (3.175mm)
- Temperature Range: -200°C to +450°C continuous operation
- Pressure Rating: Vacuum to 300psig
- Chemical Compatibility: Resistant to all semiconductor process chemicals
- Compliance: Meets SEMI F19 standards for semiconductor materials
Functional Features:
- Excellent thermal conductivity for uniform heat distribution
- Superior conformability ensuring leak-tight sealing on imperfect surfaces
- Exceptional resistance to thermal cycling and shock
- Low outgassing properties suitable for vacuum applications
- Easy installation with flexible design
- Long service life reducing maintenance requirements
- Compatibility with standard AMAT chamber flange designs
Application Scenarios:
- High-temperature furnace sealing
- Thermal processing equipment sealing
- Deposition chamber high-temperature sealing
- Etch chamber component sealing
- Vacuum system high-temperature connections
- Wafer annealing equipment sealing
