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AMAT 0050-32172 Exhaust Foreline Heater Assembly
Product Description: A temperature-controlled heating assembly designed to prevent process gas condensation and ensure consistent gas flow in semiconductor equipment exhaust systems. Maintains critical exhaust line temperatures to optimize process efficiency and equipment reliability.
Technical Specifications:
- Heating Element: Mineral-insulated resistance heating element
- Power Rating: 300W, 240V AC single-phase
- Temperature Control Range: 80°C to 150°C adjustable setpoint
Detailed content
- Temperature Uniformity: ±3°C across entire heated length
- Insulation Material: High-temperature ceramic fiber insulation
- Housing Material: 304 stainless steel with corrosion-resistant coating
- Length: 36″ (914mm) heated section
- Diameter: Accommodates 2″ (50.8mm) outer diameter tubing
- Weight: 2.8kg
Functional Features:
- Integrated temperature controller with closed-loop regulation
- Over-temperature protection with automatic shutoff
- Fast heat-up response reaching setpoint in <10 minutes
- Even heat distribution preventing cold spots
- Low power consumption compared to alternative heating methods
- Easy installation with clamp-on design
- Compatibility with standard semiconductor exhaust systems
Application Scenarios:
- Semiconductor process chamber exhaust lines
- Chemical vapor deposition (CVD) system exhaust
- Etching equipment exhaust heating
- Gas delivery line temperature maintenance
- Vacuum pump inlet line heating
- Process waste gas handling systems
