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AMAT 3700-03788 High-Performance O-Ring Seal Assembly
Product Description: A specialized elastomeric seal component designed for critical vacuum and pressure sealing applications in semiconductor processing chambers. Engineered to maintain excellent sealing performance under extreme process conditions while meeting ultra-clean requirements.
Technical Specifications:
- Material: Chemraz® 513 perfluoroelastomer (FFKM)
- Durometer: 80 Shore A
Detailed content
- Inner Diameter: 12.75″ (323.85mm)
- Cross-Section Diameter: 0.210″ (5.33mm)
- Temperature Range: -20°C to +327°C continuous operation
- Chemical Compatibility: Resistant to all semiconductor process chemicals and gases
- Vacuum Compatibility: Suitable for ultra-high vacuum (UHV) applications
- Shelf Life: 5 years when stored properly
Functional Features:
- Exceptional resistance to plasma and process gas degradation
- Zero particle generation under dynamic sealing conditions
- Excellent compression set resistance for long-term sealing performance
- Low outgassing properties meeting SEMI F20 standards
- Easy installation with precise dimensional tolerances
- Compatibility with standard AMAT chamber flange designs
- Long service life reducing maintenance frequency
Application Scenarios:
- Vacuum chamber door and access port sealing
- Process gas line connections in semiconductor equipment
- High-temperature deposition chamber sealing
- Etch chamber component sealing
- Wafer handling vacuum systems
- Cleanroom equipment requiring high-purity sealing
