Digital guide
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AMAT 0020-53569
Product Name: Wafer Support Pin Assembly
Product Description: A precision-engineered wafer support pin assembly designed for stable wafer positioning in semiconductor process chambers, ensuring accurate processing with minimal contamination.
Technical Specifications:
- Material: High-purity alumina ceramic (99.8%)
Detailed content
- Length: 80mm
- Diameter: 5mm
- Tip Radius: 0.8mm
- Surface Finish: Polished to Ra <0.1μm
- Operating Temperature: -40°C to +620°C
- Compressive Strength: >2500 MPa
- Wear Resistance: Excellent under vacuum conditions
- Dimensional Tolerance: ±0.01mm
Functional Features:
- Ultra-smooth surface to prevent wafer scratching
- High wear resistance for extended service life
- Excellent thermal stability at elevated temperatures
- Chemical inertness to process environments
- Precision manufacturing for consistent performance
- Low particle generation during operation
- Compatibility with standard support mechanisms
Application Scenarios:
- Semiconductor process chamber wafer support
- Wafer positioning systems
- Vacuum chamber wafer handling
- PVD/CVD equipment wafer support
- Semiconductor manufacturing automation
