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AMAT 0021-19973
Product Name: 300mm Housing Filter EEP Assembly
Product Description: A precision-engineered filter housing assembly designed for ultra-high-purity gas filtration in 300mm semiconductor process chambers, ensuring contamination-free process environments and maintaining vacuum integrity.
Technical Specifications:
- Material: 316L electropolished stainless steel
Detailed content
- Compatibility: 300mm wafer processing systems
- Filter Type: High-efficiency particulate (EEP) filtration
- Operating Pressure: UHV compatible (10⁻⁹ Torr)
- Operating Temperature: -20°C to +120°C
- Surface Finish: Electropolished to Ra <0.2μm
- Leak Rate: <1×10⁻¹⁰ atm-cc/sec He
- Dimensions: 280mm diameter × 80mm height
- Weight: 1.8kg
Functional Features:
- High-efficiency particulate removal for process purity
- UHV-compatible construction for vacuum stability
- Smooth internal surfaces to minimize particle traps
- Corrosion-resistant for compatibility with process gases
- Easy installation and filter replacement
- Precision machining for perfect chamber fit
- Low outgassing properties for clean process environments
Application Scenarios:
- 300mm semiconductor process chamber gas filtration
- UHV vacuum system contamination control
- Semiconductor manufacturing gas delivery systems
- PVD/CVD chamber process gas purification
- Cleanroom gas handling equipment
