Digital guide
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AMAT 0020-20123
Product Name: DC Bias Isolator Assembly
Product Description: A specialized ceramic isolator assembly designed for DC bias applications in semiconductor process chambers, providing electrical isolation while maintaining process stability and vacuum integrity.
Technical Specifications:
- Material: High-purity alumina ceramic (99.8%)
Detailed content
- Outer Diameter: 90mm
- Inner Diameter: 55mm
- Thickness: 18mm
- Dielectric Strength: >20 kV/mm
- DC Voltage Rating: 10kV DC
- Operating Temperature: -30°C to +700°C
- Vacuum Compatibility: UHV suitable (10⁻⁹ Torr)
- Dimensional Tolerance: ±0.02mm
Functional Features:
- Excellent DC electrical insulation properties
- High thermal stability at elevated temperatures
- Chemical resistance to semiconductor process environments
- Precision manufacturing for perfect fit
- Long service life in harsh process conditions
- Low particle generation during operation
- Compatibility with standard DC bias systems
Application Scenarios:
- Semiconductor process chamber DC bias isolation
- Electrostatic chuck (ESC) DC bias systems
- Plasma processing equipment DC components
- Vacuum chamber electrical isolation
- Semiconductor manufacturing process integration
