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AMAT 0020-04130
Product Name: Insulator Washer Assembly
Product Description: A precision-engineered ceramic insulator washer providing electrical isolation for fasteners and connections in semiconductor process chambers, maintaining vacuum integrity and process purity.
Technical Specifications:
- Material: High-purity alumina ceramic (99.8%)
Detailed content
- Outer Diameter: 25mm
- Inner Diameter: 10mm
- Thickness: 5mm
- Dielectric Strength: >18 kV/mm
- Operating Temperature: -40°C to +650°C
- Vacuum Compatibility: UHV suitable (10⁻⁹ Torr)
- Dimensional Tolerance: ±0.01mm
Functional Features:
- Superior electrical insulation for fastener connections
- High thermal stability at elevated process temperatures
- Chemical inertness to process environments
- Precision machining for tight dimensional control
- Zero particle generation under process conditions
- Excellent mechanical strength and wear resistance
- Easy installation and replacement
Application Scenarios:
- Semiconductor process chamber fastener isolation
- Vacuum chamber component connections
- RF shield assembly fastener isolation
- High-temperature equipment electrical isolation
- Semiconductor manufacturing equipment assembly
