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AMAT 0021-15160
Product Name: Middle Isolator Ring Assembly
Product Description: A high-performance ceramic isolator ring providing electrical isolation between chamber components in semiconductor plasma processing equipment, maintaining mechanical stability and vacuum integrity.
Technical Specifications:
- Material: High-purity alumina ceramic (99.8%)
Detailed content
- Outer Diameter: 200mm
- Inner Diameter: 160mm
- Thickness: 15mm
- Dielectric Strength: >18 kV/mm
- Volume Resistivity: >10¹⁴ Ω·cm
- Operating Temperature: -30°C to +650°C
- Vacuum Compatibility: UHV suitable (10⁻⁹ Torr)
- Dimensional Tolerance: ±0.02mm
Functional Features:
- Superior electrical insulation for plasma chamber components
- High thermal stability at elevated process temperatures
- Chemical inertness to aggressive plasma environments
- Precision machining for tight dimensional control
- Zero particle generation under process conditions
- Excellent mechanical strength and shock resistance
- Low thermal expansion coefficient matching silicon wafers
Application Scenarios:
- Semiconductor plasma etching chambers
- PVD/CVD chamber component isolation
- RF shield assembly electrical isolation
- Vacuum chamber structural supports
- High-temperature wafer processing equipment
