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AMAT 3300-04819
Product Name: High-Purity VCR Union Fitting
Product Description: A face-seal metal union fitting designed for ultra-high purity gas delivery systems, providing a hermetic and repeatable seal for connecting precision gas pipelines in semiconductor processing tools.
Technical Specifications:
- Material: 316L stainless steel with electropolished internal surface
Detailed content
- Connection Type: VCR metal face-seal structure
- Pressure Rating: Vacuum to 3000 PSI
- Surface Finish: Internal Ra ≤0.2μm, no dead volume or crevices
- Leak Rate: ≤1×10⁻⁹ atm·cc/s He under standard test conditions
Functional Features:
- Achieves zero leakage in high-purity and ultra-high vacuum gas systems
- Reusable and allows multiple disassembly and reassembly operations
- Resists corrosion from specialty electronic gases and corrosive media
- Cleanroom-packaged and pre-cleaned to SEMI standard requirements
- Ensures consistent gas flow without turbulence or residue accumulation
Application Scenarios: Used in gas cabinets, gas panels, MFC pipelines and process chamber gas inlet systems for transporting electronic specialty gases.
