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AMAT MA-14639
Product Name: Precision Diaphragm Pressure Regulator
Product Description: A high-precision single-stage pressure regulator dedicated to ultra-high purity gas systems, delivering stable output pressure with high accuracy and low hysteresis for semiconductor process gas control.
Technical Specifications:
- Inlet Pressure Range: 0–2500 PSI
Detailed content
- Outlet Pressure Range: 0–150 PSI
- Control Accuracy: ±0.2% of full-scale output
- Wetted Parts: 316L electropolished stainless steel, PTFE
- Connection Specification: 1/4-inch VCR face-seal fittings
Functional Features:
- Maintains constant output pressure unaffected by inlet pressure fluctuations
- Low hysteresis and high sensitivity for precise pressure adjustment
- Diaphragm-sealed structure eliminates internal leakage and contamination
- Excellent compatibility with corrosive and flammable electronic gases
- Built-in overpressure protection to ensure operational safety
Application Scenarios: Deployed in gas delivery systems for process chambers, MFC front-end pressure regulation and utility gas supply modules in semiconductor manufacturing equipment.
