Digital guide
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Detailed content
- Control Range: Capacitor tuning range 10-1000pF
- Interface: RS-232/DeviceNet communication + analog I/O
- Power Supply: 24V DC
- Operating Temp: 0°C to +55°C
Functional Features:
- Real-time impedance matching for maximum power transfer to plasma.
- Fast tuning speed to stabilize plasma during process transitions.
- Monitors forward/reflected power and provides fault diagnostics.
- Stores multiple tuning profiles for different process recipes.
Application Scenarios: RF plasma systems in Etch, PECVD, and RTP chambers requiring automatic impedance matching.
