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AMAT 1350-00683
Product Name: Pneumatic Solenoid Valve Manifold Block
Product Description: A precision-machined manifold block designed to integrate multiple pneumatic solenoid valves into a compact assembly, enabling centralized control of various actuators, valves, and cylinders in semiconductor processing equipment.
Technical Specifications:
- Material: Anodized 6061‑T6 aluminum alloy
Detailed content
- Port Configuration: Multi‑port integrated design with 1/8″ NPT internal connections
- Operating Pressure: 40–120 PSI
- Operating Temperature: -10°C to +70°C
- Sealing Material: FKM fluorocarbon elastomer
- Mounting: Standard panel or DIN‑rail mounting compatible
Functional Features:
- Centralizes pneumatic control to simplify tubing routing and maintenance
- Minimizes leak points through integrated internal passageways
- Provides stable air distribution with low pressure drop
- Resists corrosion and oxidation in cleanroom environments
- Supports quick installation and replacement of individual solenoid valves
Application Scenarios: Used in vacuum valve actuators, slit valve control, chamber door mechanisms, and gas panel pneumatic systems across AMAT platforms.
