Digital guide
You are here:
AMAT 0010-03487
Product Name: Wafer Handling Robot Arm Shaft Assembly
Product Description: A high‑precision drive shaft assembly for wafer transfer robots, transmitting rotational and linear motion while maintaining rigidity, flatness, and cleanliness during wafer transportation.
Technical Specifications:
- Material: Hard‑coated aluminum alloy with stainless steel reinforcement
Detailed content
- Surface Finish: Precision ground, Ra ≤0.2μm
- Torsional Rigidity: High torque capacity without deflection
- Runout Tolerance: Total indicator reading ≤0.005mm
- Operating Temperature: 0°C to +60°C
- Lubrication: Vacuum‑compatible, low‑outgassing dry lubrication
Functional Features:
- Delivers precise motion transmission for accurate wafer positioning
- Maintains stability during high‑speed acceleration and deceleration
- Low particle generation to comply with Class 10 cleanroom standards
- Resists wear and fatigue during continuous cyclic operation
- Direct‑fit design for fast replacement during maintenance
Application Scenarios: Used in multi‑link wafer transfer robots in Centura, Endura, and Producer 200mm/300mm wafer platforms.
