Digital guide
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AMAT 0041-09027
Product Name: High-Purity Process Gas Line Assembly
Product Introduction: A precision-fabricated gas line assembly designed for semiconductor process gas delivery systems, ensuring clean, contamination-free gas transport to process chambers.
Technical Specifications:
- Material: High-purity 316L electropolished stainless steel
Detailed content
- Tubing Diameter: Standard 1/4″ or 3/8″ for process gas applications
- Fittings: VCR-style metal face-seal fittings for zero-leak connections
- Surface Finish: Ra ≤ 10 μin for minimal particle adhesion
- Pressure Rating: Designed for high-pressure process gas delivery
Functional Features:
- Ensures contamination-free transport of ultra-pure process gases
- Zero-leak design maintains process gas purity and stability
- Resists corrosion from aggressive semiconductor process gases
- Easy installation and secure, repeatable connections
- Minimizes pressure drop for efficient gas delivery
Application Scenarios:
- Process gas delivery in semiconductor CVD and PVD chambers
- Gas line assembly for AMAT Centura and Producer series systems
- Replacement gas line for semiconductor equipment maintenance
- Critical component for maintaining process uniformity in wafer fabrication
