Digital guide
You are here:
AMAT 0040-39883
Product Name: WXZ CVD Chamber Dual Feedthrough Assembly
Product Introduction: A precision-engineered dual feedthrough assembly designed for AMAT Centura WXZ CVD process chambers, enabling reliable electrical and fluid connections while maintaining ultra-high vacuum integrity.
Technical Specifications:
- Material: 316L stainless steel with high-purity ceramic insulators
Detailed content
- Vacuum Rating: UHV-compatible, leak-tight design
- Feedthrough Type: Dual-channel for electrical signals and process fluids
- Surface Finish: Electropolished to minimize particle adhesion
- Compatibility: AMAT Centura 5200 WXZ CVD systems
Functional Features:
- Provides hermetic feedthroughs for power, signals, and process media
- Maintains vacuum integrity in aggressive CVD process environments
- Resists chemical corrosion from process gases and cleaning agents
- Ensures stable electrical isolation and signal transmission
- Facilitates easy installation and maintenance
Application Scenarios:
- Feedthrough assembly for AMAT Centura WXZ CVD process chambers
- Critical component for 200mm wafer thin-film deposition systems
- Replacement part for semiconductor equipment vacuum chamber maintenance
- Essential for maintaining process stability in advanced CVD manufacturing
