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AMAT 0020-09999
Product Name: Ceramic Shield Assembly
Product Description: A high-purity ceramic shield designed to protect chamber components from plasma exposure and contamination in semiconductor processing environments.
Technical Specifications:
- Material: High-purity alumina ceramic
Detailed content
- Temperature Resistance: Up to 1400°C
- Dielectric Strength: >20 kV/mm
- Surface Finish: Ra < 0.6 μm
- Dimensional Tolerance: ±0.03 mm
- Vacuum Compatibility: UHV rated with low outgassing
Functional Features:
- Excellent plasma and chemical resistance
- Superior electrical insulation properties
- High thermal stability under extreme conditions
- Non-contaminating material composition
- Easy installation and replacement
- Long service life in harsh processing environments
Application Scenarios:
- Plasma etch chamber component protection
- PVD and CVD process chamber shielding
- Semiconductor wafer fabrication cleanrooms
- High-density plasma processing systems
- AMAT Centura and Endura platforms
