Digital guide
You are here:
AMAT 0021-34728
Product Name: SICONI 300mm Blocker Plate
Product Introduction: A precision-engineered blocker plate component for 300mm wafer SICONI process applications, controlling process gas distribution and deposition uniformity.
Technical Specifications:
- Application: Specifically designed for 300mm wafer SICONI processes
Detailed content
- Material: High-purity, process-compatible metal alloy
- Dimensions: Precision-sized for 300mm wafer process chambers
- Weight: 2 kg (approximate)
- Surface Finish: Optimized for minimal particle adhesion and easy cleaning
Functional Features:
- Controls process gas flow for uniform deposition across 300mm wafers
- Prevents unwanted deposition on non-target chamber components
- Enhances process uniformity and repeatability
- Easy installation and alignment within process chambers
- Resists chemical attack from SICONI process chemistries
Application Scenarios:
- 300mm wafer SICONI deposition processes
- Process uniformity control in advanced semiconductor manufacturing
- Blocker plate for AMAT 300mm wafer processing platforms
- Replacement component for SICONI process chamber maintenance
