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AMAT 0015-16484
Product Name: Electrical Feedthrough Assembly
Product Introduction: A hermetically sealed electrical feedthrough assembly for transmitting electrical signals and power across vacuum chamber boundaries.
Technical Specifications:
- Seal Type: Hermetic ceramic-to-metal sealing for vacuum integrity
Detailed content
- Pin Configuration: Multi-pin configuration for multiple signal/power channels
- Voltage Rating: Suitable for high-voltage and low-voltage signal transmission
- Vacuum Compatibility: Designed for UHV environments with zero virtual leaks
- Material: 316L stainless steel body with high-purity ceramic insulation
Functional Features:
- Maintains vacuum integrity while transmitting electrical signals
- Isolates electrical signals from chamber ground potential
- Resists corrosion from process gases and cleaning chemicals
- Easy installation and replacement during chamber maintenance
- Compatible with standard AMAT chamber flange configurations
Application Scenarios:
- Electrical feedthrough for process chamber sensor connections
- Power transmission to internal chamber heaters and actuators
- Signal transmission for in-situ process monitoring equipment
- Replacement feedthrough for AMAT semiconductor process chambers
