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AMAT 0022-94001 Ceramic Insulator Bushing
Product Overview: The AMAT 0022-94001 is a high-performance ceramic insulator bushing designed for use in Applied Materials semiconductor equipment. It serves as an electrical insulator and mechanical support for electrical components such as wires, cables, and electrodes, ensuring safe and reliable operation in high-voltage, high-temperature environments. This bushing is manufactured from advanced ceramic materials, offering excellent electrical insulation, thermal stability, and plasma resistance. It is a critical component for preventing electrical arcing and ensuring the integrity of the equipment’s electrical system.
Technical Specifications: – Material Composition: High-purity aluminum nitride (AlN) ceramic, offering excellent electrical insulation and thermal conductivity. – Dimensions: Outer diameter 20mm, inner diameter 10mm, length 50mm, with a surface roughness ≤ 0.1 μm. – Electrical Insulation: Volume resistivity ≥ 1×10¹⁵ Ω·cm at 25°C, ensuring effective electrical isolation.
Detailed content
– Thermal Conductivity: 180 W/m·K, providing efficient heat dissipation from electrical components. – Temperature Resistance: Maximum continuous operating temperature of 1000°C, with short-term resistance up to 1200°C. – Plasma Resistance: Resistant to erosion from plasma (CF₄, Cl₂, Ar) and process gases, minimizing material loss. – Dimensional Tolerance: ±0.005mm, ensuring precise fit with electrical components and equipment mounts. – Certification: Complies with SEMI S2/S8 safety standards and ISO 9001 quality control requirements.
Functional Features: – Provides effective electrical insulation for wires, cables, and electrodes, preventing electrical arcing and equipment damage. – Acts as a mechanical support, securing electrical components in place and preventing movement during equipment operation. – Dissipates heat efficiently from electrical components, preventing overheating and extending their service life. – Resists plasma erosion and chemical attack, ensuring reliable performance in harsh fab environments. – Maintains structural integrity at high temperatures, preventing warping or cracking during thermal cycling. – Minimizes particle generation, with a smooth surface that prevents dust accumulation and contamination. – Integrates seamlessly with AMAT’s electrical systems, ensuring compatibility with other components.
Application Scenarios: – Installed in AMAT’s plasma etching, CVD, and PVD systems to insulate and support electrodes and electrical cables. – Used in high-voltage components such as RF power supplies and plasma generators. – Applied in 200mm and 300mm wafer manufacturing lines for logic chips, memory chips, and power semiconductor devices. – Suitable for semiconductor fabs with high-voltage equipment and strict safety requirements. – Ideal for high-temperature processes, where thermal stability and heat dissipation are critical. – Used in research and development facilities for advanced electrical system design and testing.
