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AMAT 0020-04541 Precision Ceramic Insulator Washer
Product Overview: The AMAT 0020-04541 is a precision ceramic insulator washer designed for use in Applied Materials semiconductor equipment. It serves as an electrical insulator and mechanical spacer between metal components, ensuring electrical isolation and precise alignment. This washer is manufactured from high-purity ceramic materials, offering excellent electrical insulation, high-temperature resistance, and corrosion resistance. It is a critical component for maintaining the integrity of the equipment’s electrical and mechanical systems, preventing electrical short circuits and ensuring proper component alignment.
Technical Specifications: – Material Composition: High-purity alumina (Al₂O₃) ceramic with a purity of 99.99%, offering excellent electrical insulation and mechanical strength. – Dimensions: Outer diameter 15mm, inner diameter 8mm, thickness 2mm, with a surface roughness ≤ 0.1 μm.
Detailed content
– Electrical Insulation: Volume resistivity ≥ 1×10¹⁴ Ω·cm at 25°C, ensuring effective electrical isolation between metal components. – Temperature Resistance: Maximum continuous operating temperature of 1200°C, with short-term resistance up to 1400°C. – Mechanical Strength: Hardness of 9 Mohs, ensuring resistance to wear and deformation. – Dimensional Tolerance: ±0.005mm, ensuring precise fit and alignment between components. – Compatibility: Resistant to process gases, plasma, and cleaning chemicals used in semiconductor fabs. – Certification: Complies with SEMI S2/S8 safety standards and ISO 9001 quality control requirements.
Functional Features: – Provides effective electrical insulation between metal components, preventing electrical short circuits and equipment damage. – Acts as a mechanical spacer, ensuring precise alignment of components and maintaining consistent spacing. – Resists high temperatures and thermal cycling, ensuring long-term reliability in harsh fab environments. – Resists corrosion from process gases and cleaning chemicals, extending the washer’s service life. – Minimizes particle generation, with a smooth surface that prevents dust accumulation and contamination. – Compatible with AMAT’s standard fasteners and components, ensuring seamless integration. – Easy to install and replace, reducing maintenance downtime and improving equipment availability.
Application Scenarios: – Installed in AMAT’s process chambers, electrical cabinets, and sensor assemblies to insulate and space metal components. – Used in electrodes, heaters, and other high-voltage components to prevent electrical arcing. – Applied in 200mm and 300mm wafer manufacturing lines for logic chips, memory chips, and power semiconductor devices. – Suitable for semiconductor fabs with strict electrical safety and component alignment requirements. – Ideal for high-temperature processes, where thermal stability and electrical insulation are critical. – Used in research and development facilities for custom equipment assembly and testing.
