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AMAT 0020-06338 Ceramic Insulator Sleeve
Product Overview: The AMAT 0020-06338 is a high-performance ceramic insulator sleeve designed for use in Applied Materials semiconductor equipment. It serves as an electrical insulator and thermal barrier for electrical components such as wires, cables, and electrodes, ensuring safe and reliable operation in high-voltage, high-temperature environments. This sleeve is manufactured from advanced ceramic materials, offering excellent electrical insulation, thermal stability, and plasma resistance. It is a critical component for preventing electrical arcing, protecting sensitive equipment components, and maintaining the integrity of the equipment’s electrical system.
Technical Specifications: – Material Composition: High-purity aluminum nitride (AlN) ceramic, offering excellent electrical insulation and thermal conductivity. – Dimensions: Outer diameter 18mm, inner diameter 12mm, length 40mm, with a surface roughness ≤ 0.1 μm.
Detailed content
– Electrical Insulation: Volume resistivity ≥ 1×10¹⁵ Ω·cm at 25°C, ensuring effective electrical isolation between components. – Thermal Conductivity: 170 W/m·K, providing efficient heat dissipation from electrical components to prevent overheating. – Temperature Resistance: Maximum continuous operating temperature of 1000°C, with short-term resistance up to 1200°C. – Plasma Resistance: Resistant to erosion from plasma (CF₄, Cl₂, Ar) and process gases, minimizing material loss. – Dimensional Tolerance: ±0.005mm, ensuring precise fit with electrical components and equipment mounts. – Certification: Complies with SEMI S2/S8 safety standards and ISO 9001 quality control requirements.
Functional Features: – Provides effective electrical insulation for wires, cables, and electrodes, preventing electrical arcing and equipment damage. – Acts as a thermal barrier, reducing heat transfer between hot components and sensitive electrical parts. – Dissipates heat efficiently from electrical components, extending their service life and ensuring stable performance. – Resists plasma erosion and chemical attack, ensuring reliable performance in harsh fab environments. – Maintains structural integrity at high temperatures and under vacuum conditions, preventing warping or cracking. – Minimizes particle generation, with a smooth surface that prevents dust accumulation and contamination. – Integrates seamlessly with AMAT’s electrical systems, ensuring compatibility with electrodes, power supplies, and control modules.
Application Scenarios: – Installed in AMAT’s plasma etching, CVD, and PVD systems to insulate and protect electrodes and electrical cables. – Used in high-voltage components such as RF power supplies and plasma generators. – Applied in process chambers to insulate electrical feedthroughs and sensor wiring. – Suitable for 200mm and 300mm wafer manufacturing lines for logic chips, memory chips, and power semiconductor devices. – Ideal for high-temperature processes, where thermal stability and electrical insulation are critical. – Used in research and development facilities for advanced electrical system design and testing.
