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AMAT 0030-20002
Product Name: Precision Vacuum Feedthrough Assembly (Electrical & Signal)
Product Description: A hermetically sealed electrical feedthrough designed to transmit power, signals, and control voltages across the vacuum chamber wall while maintaining ultra-high vacuum (UHV) integrity. It provides isolated electrical pathways for internal sensors, heaters, and actuators.
Technical Specifications:
- Material: 316L stainless steel body, alumina ceramic insulation
Detailed content
- Pin Configuration: Multi-pin array (8 high-current pins + 16 signal pins)
- Voltage Rating: 500V AC/DC (power), 24V DC (signal)
- Current Capacity: 15A per power pin, 1A per signal pin
- Leak Rate: < 1 x 10⁻⁹ mbar·l/s (UHV compatible)
- Temperature Range: -20°C to +200°C
- Mounting: ConFlat (CF) flange for UHV sealing
Key Features:
- Hermetic, bakeable construction for UHV compatibility
- High dielectric strength prevents cross-talk and arcing
- Low outgassing materials maintain chamber cleanliness
- Corrosion-resistant to process gases and plasma environments
- Robust design withstands thermal cycling and pressure shocks
Application Scenarios:
Used in AMAT Centura, Endura, and P5000 chambers for powering internal heaters, ESC pedestals, and transmitting sensor signals (temperature, pressure) in deposition and etch processes.
