Digital guide
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AMAT 0020-89739
Product Name: Ceramic Insulator / Shield Assembly
Product Description: High-performance electrically insulating component for semiconductor process chambers.
Technical Specifications:
- Material: High-purity alumina (Al₂O₃) ceramic
- Excellent thermal stability and dielectric strength
Detailed content
- Precision machined to tight tolerances for chamber fit
- Resistant to corrosive process gases and plasma etching
Functional Features:
- Provides electrical isolation between chamber components
- Prevents electrical arcing and parasitic plasma discharge
- Withstands extreme thermal cycling without degradation
- Low outgassing properties suitable for high-vacuum environments
Application Scenarios:
- Etch and deposition chambers in Centura and Endura platforms
- PVD (Physical Vapor Deposition) and CVD process modules
- Semiconductor wafer processing requiring high electrical isolation
