Digital guide
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Detailed content
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- Inner Diameter: 180mm
- Outer Diameter: 200mm
- Thickness: 10mm
- Dielectric Constant: 4.5
- Max Operating Temperature: 800°C
- Thermal Conductivity: 40 W/m·K
- Functional Features:
- High-voltage dielectric isolation
- Excellent thermal conductivity
- Low plasma erosion rate
- Non-contaminating surface
- High mechanical strength
- Chemical inertness
- Applications: DC bias isolation for 200mm PVD chambers; critical component for maintaining electrode voltage isolation during deposition.
