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AMAT 0020-03004
- Product Name: Quartz Viewport Protector
- Product Description: Fused quartz protective window for chamber viewports, shielding optical sensors and cameras from process plasma and contamination while maintaining optical transparency.
- Technical Specifications:
- Material: High-purity fused silica quartz
Detailed content
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- Dimensions: 80mm diameter × 5mm thickness
- Transmission: >90% (250–2000 nm)
- Max Temperature: 1100°C
- Surface Finish: Double-side polished, Ra < 0.5μm
- Mounting: Flange-mounted with Kalrez gasket
- Functional Features:
- High transmission for UV/Vis/IR monitoring
- Plasma and chemical erosion resistance
- Non-contaminating ultra-smooth surface
- Thermal shock resistant
- Easy to clean and replace
- Compatible with all vacuum sealing methods
- Applications: Protection for endpoint detectors, pyrometers, and video cameras in PVD, CVD, and Etch chambers.
